Manufacturer web site: http://3sref.com/en/index.php
Comparison of Wafer Handling Equipment
| Item | Wafer Tray | Wafer Carrier (FOUP) | Wafer Carrier (FOSB) | Wafer Jar Case |
|---|---|---|---|---|
| Usage | Workpiece handling and storage during processing | Cleanroom transport and wafer storage | Transport between factories and storage | Transport and storage between factories |
| Structure | Flat plate structure, minimal protection | Enclosed pod with front opening | Fully enclosed with inner cushion | Fully enclosed structure |
| Protection Level | Low (vulnerable to external contamination) | High (dust-free, shock-proof) | High (dust, vibration, shock-proof) | High |
| Automation Compatibility | Manual operation compatible | Automated transport system compatible | Partial automation system compatibility | Compatible with automatic identification |
| Material | Reinforced plastic, ceramic | High-strength ESD-protected plastic | Reinforced plastic, strengthened buffer materials | Internal reinforced plastic, reinforced design |
| Usage Environment | For factory settings such as cleaning, drying, and manual work | For cleanroom transportation | For transport between factories | For external storage and transportation |
| Ease of Movement | Poor | Good | Good | Good |
| Dust Prevention | Poor | Excellent | Excellent | Very Good |
| Reusable Cycle Count | Hundreds of times | Over hundreds of cycles | Over hundreds of cycles | Over hundreds of cycles |
| Cleaning Usage | None | Requires dedicated cleaning equipment | Requires dedicated cleaning equipment | Requires dedicated cleaning equipment |
| Cost | Low | Medium | High | High |
| Advantages | Simple structure, high cost-efficiency | Superior wafer protection | Excellent shock absorption and dust prevention | Excellent wafer protection |
| Disadvantages | Low protection performance | Relatively expensive | Bulky and heavy | Cost of buffer parts is high |
