CMP Retainer Ring

Sale price$0.00


Willbe S&T manufacture to highest Industry standards Retraining Rings for all CMP Equipment: AMAT, EBARA, IPEC, STRABAUGH,…

Different Designs are possible either using Willbe S&T patented Inject Molding Design with PEEKS or PBN Materials):

For PEEK for example,

  • Preventing SUS and PEEK/PPS separation issues by utilizing a non-bonded structure design
  • Completely outer molded PEEK material reduces defect issue that is caused by solidifying slurry, and improves lifetime.
  • Side hole design enables the removal of slurry between Retainer Ring and Membrane by jetting water through the side hole, reducing defect counts.
  • Application: AMAT Reflexion & Reflexion LK
  • High quality
  • Competitively priced
  • Also possible for New innovative Materials like PBN

But also for standard 2 pieces bonded designs with PPS, PEEK or other Materials for 150, 200mm or 300mm CMP Heads

For detailed information or quotes please contact

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